Microscopic four-point probe based on SU-8 cantilevers
نویسندگان
چکیده
منابع مشابه
طراحی و ساخت دستگاه four-point probe station
یکی از ویژگی های اساسی مواد هادی مقاومت الکتریکی آن هاست که با داشتن تعداد الکترونهای آزاد لایه ظرفیت می توان مقاومت الکتریکی آن ماده را پیدا نمود. با اندازه گیری مقاومت الکتریکی مواد می توان ویژگیها و مشخصات ماده را تعیین نمود. در این پایان نامه بنا داریم به اندازه گیری مقاومت الکتریکی با استفاده چهار پراب همراستا با فاصله ثابت از هم که در تماس با سطح یک ویفر سیلیکونی هستند اقدام کنیم. در عم...
Conductivity of individual particles measured by a microscopic four-point-probe method
We introduce a technique for measuring the conductivity of individual hybrid metal, semiconducting core-shell and full-metal conducting particles by a microscopic four-point probe (μ-4PP) method. The four-point probe geometry allows for minimizing contact resistances between electrodes and particles. By using a focused ion beam we fabricate platinum nanoleads between four microelectrodes on a s...
متن کاملDirect measurement of surface-state conductance by microscopic four-point probe method
For in situ measurements of local electrical conductivity of well defined crystal surfaces in ultrahigh vacuum, we have developed microscopic four-point probes with a probe spacing of several micrometres, installed in a scanningelectron-microscope/electron-diffraction chamber. The probe is precisely positioned on targeted areas of the sample surface by using piezoactuators. This apparatus enabl...
متن کاملCharacterization of semiconductor surface conductivity by using microscopic four-point probe technique
Four-point probe characterization is a standard method for studying the electrical properties of solids and thin films. The probe spacing in four-point probe technique has to be reduced to micro-scale to obtain expected surface sensitivity and spatial resolution. Therefore, microscopic four-point probes (M4PPs) need to be combined with some microscopy techniques. Two types of M4PPs systems have...
متن کاملOpen-Source Automated Mapping Four-Point Probe
Scientists have begun using self-replicating rapid prototyper (RepRap) 3-D printers to manufacture open source digital designs of scientific equipment. This approach is refined here to develop a novel instrument capable of performing automated large-area four-point probe measurements. The designs for conversion of a RepRap 3-D printer to a 2-D open source four-point probe (OS4PP) measurement de...
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ژورنال
عنوان ژورنال: Review of Scientific Instruments
سال: 2005
ISSN: 0034-6748,1089-7623
DOI: 10.1063/1.2140443